Microfabricated triggered vacuum switch
| DWPI Title: Electrical vacuum switch apparatus for switching high voltage devices, comprises a substrate, an anode and a cathode spaced apart on a surface of the substrate, a trigger electrode, and a cover sealed over the substrate |
| Abstract: A microfabricated vacuum switch is disclosed which includes a substrate upon which an anode, cathode and trigger electrode are located. A cover is sealed over the substrate under vacuum to complete the vacuum switch. In some embodiments of the present invention, a metal cover can be used in place of the trigger electrode on the substrate. Materials used for the vacuum switch are compatible with high vacuum, relatively high temperature processing. These materials include molybdenum, niobium, copper, tungsten, aluminum and alloys thereof for the anode and cathode. Carbon in the form of graphitic carbon, a diamond-like material, or carbon nanotubes can be used in the trigger electrode. Channels can be optionally formed in the substrate to mitigate against surface breakdown. |
| Use: The electrical vacuum switch apparatus is useful for switching high voltage devices. |
| Advantage: The electrical vacuum switch apparatus is highly improved, reliable, and cost-effective. Also, an advantage of the electrical vacuum switch apparatus is that a relatively large number (up to hundreds or more) of individual devices can be batch fabricated on a common substrate without piece part assembly. Likewise, various types of carbon materials can be used in the trigger electrode to provide electron emission for initiating a vacuum arc therein including graphitic carbon, diamond-like materials, and carbon nanotubes. |
| Novelty: An electrical vacuum switch apparatus (10), comprises: (a) a substrate (12); (b) an anode (14) and a cathode (16) spaced apart on a surface of the substrate; (c) a trigger electrode (20) disposed between the anode and the cathode; and (d) a cover sealed over the substrate to provide an evacuated region where the anode, the cathode and the trigger electrode are exposed to a vacuum environment. |
| Filed: 9/21/2005 |
| Application Number: US2005231915A |
| Tech ID: SD 7753.0 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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