Method for making a micromachined microwave signal control device
| DWPI Title: Making microwave device with LIGA process by irradiating photoresist layer on dielectric substrate, removing irradiated portions to form channels, and filling channels with metal to form conductors of the waveguide and signal controller |
| Abstract: A method for fabricating a signal controller, e.g., a filter or a switch, for a coplanar waveguide during the LIGA fabrication process of the waveguide. Both patterns for the waveguide and patterns for the signal controllers are created on a mask. Radiation travels through the mask and reaches a photoresist layer on a substrate. The irradiated portions are removed and channels are formed on the substrate. A metal is filled into the channels to form the conductors of the waveguide and the signal controllers. Micromachined quasi-lumped elements are used alone or together as filters. The switch includes a comb drive, a spring, a metal plunger, and anchors. |
| Use: The method is used for making a microwave device with a LIGA process (claimed). |
| Advantage: The method provides filters with high Q and reduced volume in coplanar microwave waveguides. |
| Novelty: Making a microwave device with a Lithographic, Galvanoformung, and Abformung (LIGA) process comprises: (a) creating patterns for a waveguide and a signal controller used to control signal transmission in the waveguide on a mask, where the signal controller is a filter comprising a quasi-lumped element formed on the dielectric substrate; (b) irradiating a photoresist layer on a dielectric substrate; (c) removing irradiated portions to form channels on the substrate; and (d) filling the channels with a metal to form conductors of the waveguide and the signal controller. |
| Filed: 6/11/2008 |
| Application Number: US2008136890A |
| Tech ID: SD 8520.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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