Ovenized microelectromechanical system (MEMS) resonator
| DWPI Title: Lateral contour mode ovenized micro-electro-mechanical system (MEMS) resonator has electrodes which are coupled to top and bottom surfaces of thermally isolated mechanical resonator to generate electric field |
| Abstract: An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity. |
| Use: Lateral contour mode ovenized micro-electro-mechanical system (MEMS) resonator for use in wireless communication system. |
| Advantage: Since the heating elements are placed on a thermally isolated structure together with the resonators, the occurrence of heat leakage is reduced and the heat transfer can be controlled easily, without impacting the resonator performance by adjusting the thickness and width of the metal layers. Hence the temperature stability and the power efficiency of the ovenized micromechanical resonators can be improved effectively. The primary source of heat transfer is likely to be conduction through thermally isolating beams, the thermal conductivity of thermally isolating beams is desirably reduced both through geometry and through material selection. The thin film-deposited polycrystalline aluminum nitride is used as the supporting beam material, in which heat transfer is very limited because its small grain size to enhance phonon boundary scattering. |
| Novelty: The MEMS resonator has a thermally isolated mechanical resonator with a top surface and a bottom surface. The heating element (110) and temperature sensor are formed on mechanical resonator. The electrodes are coupled to top and bottom surfaces mechanical resonator respectively to generate an electric field through resonator. The resonator provides acoustic waves that travel in the plane of the thermally isolated mechanical resonator. The resonator is formed of aluminum nitride and the thermally isolating beam is formed of polycrystalline aluminum nitride. |
| Filed: 4/9/2012 |
| Application Number: US13442689A |
| Tech ID: SD 11703.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
| Data from Derwent World Patents Index, provided by Clarivate All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license. |