Materials, methods and devices to detect and quantify water vapor concentrations in an atmosphere
| DWPI Title: Humidity sensor for measuring very low levels of water vapor in surrounding atmosphere, has surface acoustic wave device with interdigitated electrodes, and material comprising nanoporous framework material coating bonded to electrodes |
| Abstract: We have demonstrated that a surface acoustic wave (SAW) sensor coated with a nanoporous framework material (NFM) film can perform ultrasensitive water vapor detection at concentrations in air from 0.05 to 12,000 ppmv at 1 atmosphere pressure. The method is extendable to other MEMS-based sensors, such as microcantilevers, or to quartz crystal microbalance sensors. We identify a specific NFM that provides high sensitivity and selectivity to water vapor. However, our approach is generalizable to detection of other species using NFM to provide sensitivity and selectivity. |
| Use: Humidity sensor is used for measuring very low levels of water vapor in surrounding atmosphere. |
| Advantage: The humidity sensor has excellent thermal stability and durability. The ability to modify NFM pore sizes by changing the chemical nature of the linking molecule, changing the metal center, or changing the pore geometry, enables both the chemical selectivity and adsorption properties to be optimized in a rational way. |
| Novelty: A humidity sensor has a surface acoustic wave (SAW) device formed on one surface of a quartz substrate, and a material comprising a nanoporous framework material (NFM) coating. The SAW device comprises interdigitated electrodes. The NFM coating is covalently bonded to at least a portion of the one surface between interdigitated electrodes. The NFM coating is chosen from copper (II) benzene-1,3,5-tricarboxylate, copper (II) biphenyl-3,3',5,5'-tetracarboxylic acid and copper (II) terphenyl-3,3',5,5'-tetracarboxylic acid. |
| Filed: 10/5/2011 |
| Application Number: US13253274A |
| Tech ID: SD 11807.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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