Tuning method for microresonators and microresonators made thereby

DWPI Title: Wafer for use in mechanical or electromechanical resonator, has annealable material part comprising material whose elastic modulus is altered by annealing and which retains change in elastic modulus when returned to room temperature
Abstract: A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.
Use: Wafer for use in mechanical or electromechanical resonator.
Advantage: The wafer allows a tuning layer prevents a thin-plate or Lamb wave from damage for which total thickness of a vibrating plate is characteristically less than one-half the resonant wavelength. The wafer reduces a thermal tuning effect if the total thickness grows to one half wavelength due to the added tuning layer.
Novelty: The wafer has a set of dies comprising a resonant micromechanical element and an annealed film. Each resonant element comprises a common resonator frequency that is configured by annealing a film of annealable material at an annealing temperature required to permanently change a stress state of the film for providing the annealed film and the common resonator frequency as compared to the film without annealing. An annealable material part comprises a material whose elastic modulus is altered by annealing and which retains change in elastic modulus when returned to room temperature.
Filed: 2/28/2013
Application Number: US13780285A
Tech ID: SD 12253.0
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
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