Microresonator electrode design
| DWPI Title: Acoustic width-extensional microresonator for forming frequency filters in chip, has set of stubs and set of fingers arranged such that each finger of first set of fingers opposes respective stub of second set of stubs across gap |
| Abstract: A microresonator with an input electrode and an output electrode patterned thereon is described. The input electrode includes a series of stubs that are configured to isolate acoustic waves, such that the waves are not reflected into the microresonator. Such design results in reduction of spurious modes corresponding to the microresonator. |
| Use: Acoustic width-extensional microresonator for forming frequency filters and oscillator references in a chip, a frequency filter and a mobile communications device i.e. mobile telephone (all claimed). |
| Advantage: The microresonator places the stubs in an input electrode and the output electrode to facilitate prevention of reflectance of acoustic waves into the acoustic microresonator, thus facilitating prevention of spurious modes. The microresonator utilizes a structure of the electrode that results in increased accuracy and reliability when the acoustic microresonator is employed as a filter mechanism in a mobile communications device. The microresonator removes modes to incrementally improve motional impedance and quality factor. |
| Novelty: The microresonator has first set of fingers (208a-208d) that extend from first interconnect bus (212) toward second interconnect bus (206). First set of stubs (210a-210d) extend from the first interconnect bus toward the second interconnect bus, where the first and second set of stubs (216a-216d) and the first and second set of fingers (214a-214d) are arranged such that each finger of the first set of fingers opposes a respective stub of the second set of stubs across first gap and each finger of the second set of fingers opposes a respective stub of the first set of stubs across second gap. |
| Filed: 10/10/2012 |
| Application Number: US13649025A |
| Tech ID: SD 11702.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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