Methods for suppressing spurious modes in microresonators
| DWPI Title: Method for suppressing several spurious modes in micro resonator, involves determining thickness of first dielectric and depositing first dielectric layer on top surface of micro resonator |
| Abstract: The present invention relates to methods for suppressing spurious modes in microresonators. In particular embodiments, such spurious modes can be reduced by providing one or more structural components that effectively reduce the acoustic velocity in the transducer domain. Additional methods and microresonators are described herein. |
| Use: Method for suppressing several spurious modes in micro resonator. |
| Advantage: The CAD-definable resonant frequency provides a flexible way to integrate multiple filters operating at different frequencies and bandwidths in a single chip as minimizing die-to-die variability and simplifying miniaturization. The selective inclusion and placement of the stubs in the input electrode and the output electrode can be optimized to facilitate prevention of reflectance of acoustic waves into the acoustic micro resonator as facilitating prevention of spurious modes. The structure of the electrode can be optimized to provide increased accuracy and reliability when the acoustic micro resonator is employed as a filter mechanism. |
| Novelty: The method (300) involves providing (301) a coupling-of-modes model of the micro resonator. The model comprises a forward acoustic wave and a backward acoustic wave. An acoustic velocity is adjusted (302) in a transducer domain of the model to provide a minimized spurious response. The transducer domain in the model comprises one or more electrodes. A thickness of a first dielectric layer is determined (303) that corresponds to the acoustic velocity of the minimized spurious response. The first dielectric layer is deposited (304) on a top surface of the micro resonator. The first dielectric layer comprises the thickness from the determining step and the top surface comprises one or more electrodes. |
| Filed: 8/17/2016 |
| Application Number: US15239662A |
| Tech ID: SD 13655.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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