Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors

DWPI Title: Microelectromechanical Systems (MEMS) apparatus with dynamic displacement control, used for sensing and actuation has MEMS parallel plate capacitor which is integrated with one or more memristors in series configuration
Use: MEMS apparatus with dynamic displacement control, used for sensing and actuation. Can also be used in accelerometers in automobile, for airbag deployment, gyroscopes for mobile smartphone.
Advantage: The memristor is integrated with a MEMS capacitor in a closed-loop control system to accurately sense a position of an upper electrode. Enables to be utilized to extend the MEMS operating range to 95% for a wider range of sensing and actuation applications. The memristor is arranged in a configuration using at least one coupled memristor device to enable feedback control and sensing of micro/nanoelectromechincal actuators and sensors. A MEMS parallel plate capacitor is integrated with the memristor in a simple series circuit configuration, in which it is possible to observe that the displacement can be a function of the memristance giving the possibility of interpreting the upper electrode position in form of resistance instead of capacitance.
Novelty: The MEMS apparatus has a MEMS parallel plate capacitor (20) integrated with one or more memristors (44) in a series configuration. A displacement is observable as a function of memristance, such that an upper position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by the MEMS parallel plate capacitor, restricting a change in the resistance of the memristor.
Filed: 3/31/2017
Application Number: US15516322A
Tech ID: SD 13189.2
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
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