Evanescently coupled piezoelectric acoustic devices
| DWPI Title: Electro-acoustic device e.g. inertial sensor, has multiple waveguiding membranes which comprise first and second waveguiding membranes having respective equal long straight sections which are parallel to each other |
| Abstract: An electro-acoustic device includes a plurality of suspended, piezoelectric, acoustically waveguiding membranes supported in a common plane. An input transducer coupled to one of the waveguiding membranes converts input electrical signals to traveling-wave acoustic signals. An output transducer coupled to one of the waveguiding membranes converts acoustic signals to electrical signals. At least two of the waveguiding membrane have parallel straight sections that are longer than a guided acoustic wavelength and that are mutually separated by an air gap having a width less than the guided acoustic wavelength. |
| Use: Electro-acoustic device such as inertial sensor and displacement sensor (all claimed) used for radio-frequency signal processing using piezoelectric materials. |
| Advantage: The electro-acoustic device uses transducers having focusing properties, for offering high efficiency throughout the process. The finite element simulations help in predicting the favorable value which is readily achieved for realistic intrinsic cavity loss rates. The electro-acoustic device offers a very small size to be achieved. |
| Novelty: The electro-acoustic device has an input transducer (540) which converts input electrical signals to traveling-wave acoustic signals, an output transducer (545) which converts acoustic signals to electrical signals, a substrate (510), and multiple of suspended, piezoelectric, acoustically waveguiding membranes supported in a common plane by the substrate. The input transducer is coupled to one of the waveguiding membrane. The output transducer is coupled to one of the waveguiding membrane. Multiple waveguiding membrane comprises first and second waveguiding membrane having respective equally long straight sections which are parallel to each other, longer than the wavelength, and mutually separated by an air gap having a width less than the wavelength. The waveguiding membranes are composed of lithium niobate. |
| Filed: 9/28/2017 |
| Application Number: US15718796A |
| Tech ID: SD 13668.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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