Optomechanical force sensors, cantilevers, and systems thereof

DWPI Title: Optomechanical device for providing suspended photonic cavity and probe tip in proximity to cavity, has suspended waveguide anchored at two points, where input/output waveguiding structure consists of input waveguide
Abstract: An optomechanical force sensor includes a substrate, a cantilevered beam anchored to the substrate, and a probe tip positioned near an end of the cantilevered beam distal to the substrate. A suspended waveguide is disposed on the cantilevered beam and is optically continuous with an input/output waveguiding structure. An optical cavity is defined within the suspended waveguide.
Use: Optomechanical device for providing a suspended photonic cavity and a probe tip in proximity to a cavity.
Advantage: The sensor facilitates removal and replacement of the cantilever structure and associated support after use, where probe tips can be degraded by use and even broken upon contact with a sample.
Novelty: The sensor has an input/output waveguiding structure comprising an optical waveguide (420) arranged on a substrate (410). A suspended waveguide is arranged on the cantilevered beam, and is optically continuous with the input/output waveguiding structure. An optical cavity is defined within the suspended waveguide, where the suspended waveguide is a loop-shaped waveguide anchored at two points. The input/output waveguiding structure consists of an input waveguide that joins the suspended waveguide at one of the anchor points, and an output waveguide joining the suspended waveguide at other of the anchor points.
Filed: 12/14/2016
Application Number: US15378900A
Tech ID: SD 12645.1
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
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