Active mechanical-environmental-thermal MEMS device for nanoscale characterization
| DWPI Title: Microelectromechanical system (MEMS) device for quantitative testing of mechanical properties of material samples, has moveable piston attached to sample holder for applying mechanical force to sample |
| Abstract: A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique. |
| Use: MEMS device for quantitative testing of mechanical properties of material samples within controlled chemical and temperature environment. |
| Advantage: The device provides the capability to perform small-scale quantitative mechanical testing of a material sample in an enclosed, controlled environment where both sensing and actuation can be achieved. The device can be of small dimensions to enable function within the pole-piece gap of a transmission electron microscope (TEM). Buried electrodes in the environmental chamber allow for electrical contacts to be patterned to the sample, to test the electrical and mechanical properties of the sample under environmental conditions or to provide localized heating. The actuator is anchored to the movable piston which will transfer motion to a movable anchor block that can be used to hold and pull on a sample. |
| Novelty: The MEMS device has a sealed environmental chamber comprising a sample holder for physical control of a sample and a membrane window for transmitting radiation into the sealed environmental chamber for characterization of the sample. A moveable piston is attached to the sample holder for applying a mechanical force to the sample, wherein the piston can be moved by an actuator external to the sealed environmental chamber. The device is fabricated using surface and bulk silicon micromachining. A heater is provided for heating the sample. The electrical contacts are connected to the sample for electrochemical measurement. The membrane window comprises silicon nitride. |
| Filed: 3/19/2018 |
| Application Number: US15925118A |
| Tech ID: SD 14127.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
| Data from Derwent World Patents Index, provided by Clarivate All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license. |