Optical coupler for heterogeneous integration

DWPI Title: Optical apparatus, involves forming silicon-based optical-waveguide layer on substrate, forming intermediary waveguide, and forming optically coupled component on intermediate waveguide
Abstract: In an optical apparatus, an introduced semiconductor device is heterointegrated on a silicon-based platform containing a silicon-based waveguide. A polymeric waveguide is optically coupled to the introduced semiconductor device and overlies at least a portion of the silicon-based waveguide. The polymeric waveguide is conformed as a multimode interference (MMI) coupler between the introduced semiconductor device and the silicon-based waveguide. At least the polymeric waveguide, and in embodiments, also the silicon-based waveguide, is tapered with a shape that effectuates optical coupling to the silicon-based waveguide.
Use: Optical apparatus.
Advantage: The method enables coupling light in a vertical direction between waveguides formed in a silicon-based platform and III-V devices bonded onto the platform in an improved manner.
Novelty: The apparatus has a silicon-based platform that contains a silicon-based waveguide. An introduced semiconductor device is heterointegrated on the silicon-based platform. A polymeric waveguide is optically coupled to the introduced semiconductor device and overlies a portion of the silicon-based waveguide. The polymeric waveguide is conformed as a multimode interference (MMI) coupler between the introduced semiconductor device and the silicon-based waveguide. The polymeric waveguide is tapered with a shape that effectuates optical coupling to the silicon-based waveguide.
Filed: 6/16/2020
Application Number: US16902429A
Tech ID: SD 15116.0
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
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