Hybrid piezoelectric microresonator
| DWPI Title: Hybrid piezoelectric microresonator has ferroelectric actuator layer on first electrode, second electrode on ferroelectric actuator layer, non-ferroelectric piezoelectric sensor layer on second electrode, and third electrode on non-ferroelectric piezoelectric sensor layer |
| Abstract: A hybrid ferroelectric/non-ferroelectric piezoelectric microresonator is disclosed. The hybrid microresonator uses a ferroelectric layer as the actuator as ferroelectric materials typically have higher actuation coefficients than non-ferroelectric piezoelectric materials. The hybrid microresonator uses a non-ferroelectric piezoelectric layer as the sensor layer as non-ferroelectric piezoelectric materials typically have higher sensing coefficients than ferroelectric materials. This hybrid microresonator design allows the independent optimization of actuator and sensor materials. This hybrid microresonator design may be used for bulk acoustic wave contour mode resonators, bulk acoustic wave solidly mounted resonators, free-standing bulk acoustic resonators, and piezoelectric transformers. |
| Use: Hybrid piezoelectric microresonator. |
| Advantage: The hybrid piezoelectric microresonator improve the overall coupling coefficient. |
| Novelty: Hybrid piezoelectric microresonator has a ferroelectric actuator layer (320) on a first electrode (310), a second electrode (330) on the ferroelectric actuator layer, a non-ferroelectric piezoelectric sensor layer (340) on the second electrode, and a third electrode (350) on the non-ferroelectric piezoelectric sensor layer. The first and third electrodes having an interdigitated electrode structure with a common periodicity. The first and second electrodes are adapted to receive an input electrical signal. The first and third electrodes have a plate structure or an interdigitated electrode structure. |
| Filed: 10/21/2019 |
| Application Number: US16658339A |
| Tech ID: SD 14087.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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