MEMS-tunable optical ring resonator
| DWPI Title: Microelectromechanical systems-tunable optical ring resonator for use in photonic systems, has spring mechanically and electrically coupled to top electrode, where resonant wavelength of resonator ring is tunable by applying voltage between top electrode and bottom electrode |
| Abstract: A microelectromechanical systems (MEMS)-tunable optical ring resonator is described herein. The ring resonator includes a resonator ring and a tuner ring, along with one or more springs. The springs may be internal or external, i.e., either within or outside the areal footprint of the resonator ring and the tuner ring. The one or more springs are configured to displace the tuner ring from the resonator ring by a desired gap based upon a desired resonant wavelength of the resonator ring. Tuning is implemented by applying a voltage to the ring resonator, with motion of the tuner ring causing a corresponding change in the effective index of the resonator ring. As the ring resonator is essentially a capacitive device, it draws very little power once tuning is achieved. |
| Use: Microelectromechanical systems (MEMS)-tunable optical ring resonator for use in photonic systems. Uses include but are not limited to a photonic filter, a photonic frequency multiplexer, a demultiplexer, an optical switch, an optical filter, a wavelength division multiplexer or a wavelength division demultiplexer. |
| Advantage: The resonator requires less power to tune the optical ring resonator to a desired wavelength and to maintain a desired resonance wavelength while compared to conventional optical ring resonators, and has compact structure and low power consumption. |
| Novelty: The resonator has a resonator ring adapted to have a minimum free spectral range of 1 nm. A tuner ring (222) positioned directly above the resonator ring and adapted to move in a direction normal to a plane of the resonator ring. A top electrode that mechanically coupled to the tuner ring. A bottom electrode is mechanically coupled to the resonator ring. Each spring (220) i.e. internal folded spring, is mechanically and electrically coupled to the top electrode, where resonant wavelength of the resonator ring is tunable by applying voltage between the top electrode and the bottom electrode. The resonator ring includes one of silicon (Si), silicon nitride (Si3 N4), aluminium oxide (Al2 O3), lithium niobate (LiNbO3), or tantalum pentoxide (Ta2 O5). The tuner ring includes one of silicon dioxide (SiO2) or Si3 N4. |
| Filed: 8/2/2021 |
| Application Number: US17391126A |
| Tech ID: SD 15104.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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