Concentrated thermal tuner for optical microdisk devices
| DWPI Title: Apparatus for thermal tuning of silicon microresonators, has thermal confinement structure electrically connected in series with semiconductor heater unit, where heater unit is connected between left- hand serpentine structure and right- hand structure |
| Abstract: A thermally tunable microresonator device with enhanced thermal confinement for greater efficiency is provided. A thermal confinement structure is electrically connected in series with the heater element used for tuning the microresonator. The heater element is conformed in a circular arc concentric with the microresonator, the thermal confinement structure comprises two or more tiers, and each tier comprises at least one metal trace conformed in a circular arc concentric with the microresonator. |
| Use: Apparatus for thermal tuning of silicon microresonators used in field of photonic integration, for tuning optical elements for operation at specified wavelengths. |
| Advantage: The metal lines that power the heater also serve as a concentrator for concentrating the heat back onto the modulator, and as a reservoir to keep the heat localized near a modulator to counter the loss of heat. The heat generated in an external heater is localized in the vicinity of the Modulator so as to effectuate tuning with maximum efficiency. |
| Novelty: The tuner has a semiconductor heater unit for tuning an optical microresonator. A thermal confinement structure (420) is electrically connected in series with the heater unit. The heater unit is conformed in a circular arc concentric with the resonator. The confinement structure is provided with tiers, each comprising a metal trace. The metal traces of the tiers are serially connected in left-hand and right-hand serpentine structures, respectively. The heater unit is connected between the left- hand serpentine structure and the right- hand structure. Metal traces are aluminum traces connected to the heater unit. |
| Filed: 3/24/2021 |
| Application Number: US17210833A |
| Tech ID: SD 14798.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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