Ultraviolet and visible light integrated acousto-optic modulators
| DWPI Title: Acousto-optic modulator for use in integrated silicon photonics, has substrate including surface layer formed of first material, and acoustic actuator provided on substrate, where actuator is adapted to receive actuator signal and to produce corresponding acoustic signal upon receipt of actuator |
| Abstract: An acousto-optic modulator that includes a waveguide on an acoustic actuator is disclosed. The waveguide carries an optical signal having a UV or visible wavelength. When the acoustic actuator is activated, the optical signal in the waveguide is bathed in intense acoustic waves. By using a waveguide having the appropriate dimensions to strongly confine both the optical signal and the acoustic waves, strong optomechanical coupling may be achieved between the optical and acoustic modes, resulting in an efficient modulator. By employing either intra-modal or inter-modal conversion, the modulator may be used to implement a variety of dual- or single-sideband functions, including an isolator, a phase modulator, a single-sideband frequency shifter, or a high-extinction shutter. |
| Use: Acousto-optic (AO) modulator for use in integrated silicon photonics. Uses include but are not limited to phase modulators, single-sideband frequency shifters, high-extinction shutters, and optical isolators. |
| Advantage: The modulator strongly confines the optical signal and acoustic waves by using a waveguide having the appropriate dimensions, and achieves strong optomechanical coupling between optical and acoustic modes, resulting in an efficient modulator. The modulator is used to implement a variety of dual- or single-sideband functions, including an isolator, a phase modulator, a single sideband frequency shifter, or a high-extinction shutter by using two optical spatial modes and employing either intra-modal or inter-modal conversion. |
| Novelty: The modulator (100) has a substrate (130) including a surface layer formed of a first material. An acoustic actuator (120) is provided on the substrate, where the acoustic actuator is adapted to receive an actuator signal and to produce a corresponding acoustic signal upon receipt of the actuator. A waveguide (110) is provided with a waveguide core (112) formed of second material different from the first material and adapted to transmit one of visible or UV wavelengths. A cladding (114) surrounds the core, and is formed of third material that is different from fourth material. The first material includes silicon or sapphire. The second material includes one of aluminum nitride, scandium aluminum nitride, or quartz. A first electrode and a second electrode include one of aluminum, an aluminum alloy, a silicide, or gold. The third material includes one of silicon nitride, alumina, tantalum pentoxide, gallium phosphide, or titanium oxide. The fourth material includes silica. |
| Filed: 1/25/2023 |
| Application Number: US18101222A |
| Tech ID: SD 15687.1 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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