| Abstract: | Systems and methods for conducting electron or scanning probe microscopy
are provided herein. In a general embodiment, the systems and methods for
conducting electron or scanning probe microscopy with an undersampled
data set include: driving an electron beam or probe to scan across a
sample and visit a subset of pixel locations of the sample that are
randomly or pseudo-randomly designated; determining actual pixel
locations on the sample that are visited by the electron beam or probe;
and processing data collected by detectors from the visits of the
electron beam or probe at the actual pixel locations and recovering a
reconstructed image of the sample. |