Abstract: Systems and methods for conducting electron or scanning probe microscopy
are provided herein. In a general embodiment, the systems and methods for
conducting electron or scanning probe microscopy with an undersampled
data set include: driving an electron beam or probe to scan across a
sample and visit a subset of pixel locations of the sample that are
randomly or pseudo-randomly designated; determining actual pixel
locations on the sample that are visited by the electron beam or probe;
and processing data collected by detectors from the visits of the
electron beam or probe at the actual pixel locations and recovering a
reconstructed image of the sample. |
Filed: 9/10/2014 |
Application Number: 14/482754 |
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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