Power spectrum analysis for defect screening in integrated circuit devices
| Patent Number: | 9,188,622 |
| Issued: | 11/17/2015 |
| Official Filing: | View the Complete Patent |
| Abstract: | A device sample is screened for defects using its power spectrum in response to a dynamic stimulus. The device sample receives a time-varying electrical signal. The power spectrum of the device sample is measured at one of the pins of the device sample. A defect in the device sample can be identified based on results of comparing the power spectrum with one or more power spectra of the device that have a known defect status. |
| Filed: | 12/1/2011 |
| Application Number: | 13/309,281 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |