| Abstract: | An apparatus for contaminant control, having: a first optical assembly
including: a first light homogenizer tunnel with: a first end connected
to an extreme ultra-violet light source, a second end in communication
with a destination chamber, a first enclosed space, and, a first gas
input arranged to introduce a first gas such that the first gas flows in
a first direction toward the first end and in a second direction toward
the second end. The apparatus alternately having: a second optical
assembly including: a second light homogenizer tunnel with: a third end
connected to an extreme ultra-violet light source, a fourth end in
communication with a destination chamber, a second enclosed space, a
diffusion barrier tube including: a fifth end facing the fourth end and a
sixth end in communication with a destination chamber, and a second gas
input between the second light homogenizer tunnel and the diffusion tube. |