| Abstract: | MEMS magnetometers with optically transduced resonator displacement are
described herein. Improved sensitivity, crosstalk reduction, and extended
dynamic range may be achieved with devices including a deflectable
resonator suspended from the support, a first grating extending from the
support and disposed over the resonator, a pair of drive electrodes to
drive an alternating current through the resonator, and a second grating
in the resonator overlapping the first grating to form a multi-layer
grating having apertures that vary dimensionally in response to
deflection occurring as the resonator mechanically resonates in a plane
parallel to the first grating in the presence of a magnetic field as a
function of the Lorentz force resulting from the alternating current. A
plurality of such multi-layer gratings may be disposed across a length of
the resonator to provide greater dynamic range and/or accommodate
fabrication tolerances. |