Miniaturized photoacoustic spectrometer
| Patent Number: | 9,410,931 |
| Issued: | 8/9/2016 |
| Official Filing: | View the Complete Patent |
| Abstract: | A low-power miniaturized photoacoustic sensor uses an optical microphone made by semiconductor fabrication techniques, and optionally allows for all-optical communication to and from the sensor. This allows integration of the photoacoustic sensor into systems with special requirements, such as those that would be reactive in an electrical discharge condition. The photoacoustic sensor can also be operated in various other modes with wide application flexibility. |
| Filed: | 10/17/2013 |
| Application Number: | 14/56,863 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |