Micromechanical apparatus for measurement of forces
| Patent Number: | 6,739,201 |
| Issued: | 5/25/2004 |
| Official Filing: | View the Complete Patent |
| Abstract: | A new class of micromechanical dynamometers has been disclosed which are particularly suited to fabrication in parallel with other microelectromechanical apparatus. Forces in the microNewton regime and below can be measured with such dynamometers which are based on a high-compliance deflection element (e.g. a ring or annulus) suspended above a substrate for deflection by an applied force, and one or more distance scales for optically measuring the deflection. |
| Filed: | 9/20/2000 |
| Application Number: | 9/665,978 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |