| Abstract: | A microfabricated TID comprises a microhotplate and a thermionic source
disposed on the microhotplate. The microfabricated TID can provide high
sensitivity and selectivity to nitrogen- and phosphorous-containing
compounds and other compounds containing electronegative function groups.
The microfabricated TID can be microfabricated with semiconductor-based
materials. The microfabricated TID can be combined with a microfabricated
separation column and used in microanalytical system for the rapid
on-site detection of pesticides, chemical warfare agents, explosives,
pharmaceuticals, and other organic compounds that contain nitrogen or
phosphorus. |