Microfabricated thermionic detector

Abstract: A microfabricated TID comprises a microhotplate and a thermionic source disposed on the microhotplate. The microfabricated TID can provide high sensitivity and selectivity to nitrogen- and phosphorous-containing compounds and other compounds containing electronegative function groups. The microfabricated TID can be microfabricated with semiconductor-based materials. The microfabricated TID can be combined with a microfabricated separation column and used in microanalytical system for the rapid on-site detection of pesticides, chemical warfare agents, explosives, pharmaceuticals, and other organic compounds that contain nitrogen or phosphorus.
Filed: 11/4/2004
Application Number: 10/981010
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
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