| Abstract: A microelectromechanical (MEM) filter is disclosed which has a plurality
of lattice networks formed on a substrate and electrically connected
together in parallel. Each lattice network has a series resonant
frequency and a shunt resonant frequency provided by one or more
contour-mode resonators in the lattice network. Different types of
contour-mode resonators including single input, single output resonators,
differential resonators, balun resonators, and ring resonators can be
used in MEM filter. The MEM filter can have a center frequency in the
range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when
all of the lattice networks have the same series resonant frequency and
the same shunt resonant frequency. The filter bandwidth can be increased
up to about 5% by using unique series and shunt resonant frequencies for
the lattice networks. |
| Filed: 3/2/2011 |
| Application Number: 13/39029 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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