Method to fabricate silicon chromatographic column comprising fluid ports
| Patent Number: | 6,699,392 |
| Issued: | 3/2/2004 |
| Official Filing: | View the Complete Patent |
| Abstract: | A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns. |
| Filed: | 6/10/2002 |
| Application Number: | 10/167,238 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |