Method for fabricating embedded nanostructures with arbitrary shape

Patent Number: 11,222,950
Issued: 1/11/2022
Official Filing: View the Complete Patent
Application Number: 852,763/16
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.