| Abstract: | A magnetoelastically actuated device includes a microscale cantilever arm
supported at a standoff distance from a substrate. The cantilever arm is
formed as a laminar magnetic actuator configured to bend when it is
subjected to a magnetic field. The cantilever arm includes a film of
magnetostrictive material. Also provided is a method for fabricating the
magnetoelastically actuated device. The method includes defining an
actuator mold in a layer of photoresist on a structural layer of the
cantilever arm and electrodepositing a layer of a magnetostrictive alloy
containing cobalt and iron onto the structural layer within the actuator
mold. |