| Abstract: | A microelectromechanical systems (MEMS) accelerometer that has high
sensitivity to motion along the z axis is discussed. The device includes
two symmetrical sets of bilateral, diametrically opposed high aspect
ratio flexures that tether a movable proof mass to the frame of the
device. The flexures are designed in such a way as to restrict movement
of the proof mass along the x and y axes but readily allow motion along
the z axis. More specifically, when the device experiences an
acceleration along the x or y axes, the proof mass is restricted from
moving because some of the bilateral, diametrically opposed flexures are
in compression and others are in tension. |