| Abstract: | Described herein is an apparatus that includes a varactor and an inductor
to form a resonant circuit that oscillates at a resonant frequency. The
resonant frequency is a function of a pressure of a gas within an
aperture of the varactor. In some embodiment, the varactor includes a
first layer of p-type material, a first layer of n-type material, and a
first np junction formed between the layer of p-type material and the
layer of n-type material. The aperture extends at least partially through
the layer of p-type material, at least partially through the layer of
n-type material, and entirely through the np junction. |