Formation of interconnections to microfluidic devices
| Patent Number: | 6,599,436 |
| Issued: | 7/29/2003 |
| Official Filing: | View the Complete Patent |
| Abstract: | A method is disclosed to form external interconnections to a microfluidic device for coupling of a fluid or light or both into a microchannel of the device. This method can be used to form optical or fluidic interconnections to microchannels previously formed on a substrate, or to form both the interconnections and microchannels during the same process steps. The optical and fluidic interconnections are formed parallel to the plane of the substrate, and are fluid tight. |
| Filed: | 12/6/2001 |
| Application Number: | 10/16,956 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |