Fabrication method for small-scale structures with non-planar features

DWPI Title: Method for fabricating structure, involves rotating and aligning substrate relative to deposition source, while exposing membrane to flux of deposition material such that relative motion is taking place between substrate and source
Abstract: The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.
Use: Method for fabricating structure.
Advantage: The additional layers are formed or grown on the previously formed layer after an initial layer is formed. Thus, the fabrication of small-scale structure is enabled.
Novelty: The method (1300) involves depositing the resonators on surface of a cavity (1308). The substrate relative to the deposition source is rotated and aligned, while exposing the membrane to the flux of deposition material such that while depositing the deposition material, the relative motion is taking place between the substrate and the deposition source to dynamically follow a predetermined path on surface of respective cavity, such that drawing a continuous pattern of deposited material along the predetermined path.
Filed: 11/19/2014
Application Number: US14548070A
Tech ID: SD 11578.2
This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.
Data from Derwent World Patents Index, provided by Clarivate
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