Electrostatic apparatus for measurement of microfracture strength

Patent Number: 6,424,165
Issued: 7/23/2002
Official Filing: View the Complete Patent
Abstract: A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well in excess of 1% can be applied pseudostatically, dynamically, or repetitively by these testers. There are no other practical methods to determine these material properties routinely in a process environment, and few alternatives in any circumstances.
Filed: 9/20/2000
Application Number: 9/665,980
Government Interests: STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.