| Abstract: A MEMS apparatus with dynamic displacement control includes a MEMS
parallel plate capacitor integrated with one or more memristors in a
series configuration wherein a displacement is observable as a function
of memristance, such that an upper electrode position is capable of being
interpreted in a form of a resistance rather than a capacitance. The
current is limited by said MEMS parallel plate capacitor restricting a
change in the resistance of the memristor(s). The memristor(s) can be
employed in some embodiments a sensor element to improve a MEMS operation
range. |
| Filed: 10/1/2015 |
| Application Number: 15/516322 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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