Contour mode resonators with acoustic reflectors
| DWPI Title: Micro electro mechanical resonator for e.g. oscillator, has acoustic reflector which comprises multiple elongate regions is located between acoustic resonator and substrate to provide acoustic isolation of acoustic resonator |
| Abstract: A microelectromechanical (MEM) resonator is disclosed which has a linear or ring-shaped acoustic resonator suspended above a substrate by an acoustic reflector. The acoustic resonator can be formed with a piezoelectric material (e.g. aluminum nitride, zinc oxide or PZT), or using an electrostatically-actuated material. The acoustic reflector (also termed an acoustic mirror) uses alternating sections of a relatively low acoustic impedance Z<SUB>L </SUB>material and a relatively high acoustic impedance Z<SUB>H </SUB>material to isolate the acoustic resonator from the substrate. The MEM resonator, which can be formed on a silicon substrate with conventional CMOS circuitry, has applications for forming oscillators, rf filters, and acoustic sensors. |
| Use: Micro electro mechanical (MEM) resonator. Uses included but are not limited to oscillator, radio frequency filter, sensor and acoustic spectrum analyzer. |
| Advantage: The acoustic reflector can provide increased heat sinking capability for the MEM resonator. The reflector can support the acoustic resonator over large area without distorting the shape of the contour mode. |
| Novelty: An acoustic resonator (14) suspended on a substrate (12) produces a resonant acoustic signal in response to electrical actuation. An acoustic reflector (16) is located between the acoustic resonator and substrate to provide acoustic isolation of the acoustic resonator. The acoustic reflector which is formed as cantilevered plate is extended parallel to the substrate. The acoustic reflector comprises multiple elongate regions of two different materials arranged side by side in alternating arrangement. |
| Filed: 11/20/2006 |
| Application Number: US2006602011A |
| Tech ID: SD 10130.0 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
| Data from Derwent World Patents Index, provided by Clarivate All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license. |