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Integrated transmission electron microscope

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United States Patent

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11,081,314
August 3, 2021
View the Complete Patent at the US Patent & Trademark Office
An integrated transmission electron microscope comprising multiple electron sources for tuned beams of ultrafast, scanning probe, and parallel illumination in varied beam energies can be alternated within sub-microseconds onto a sample with dynamic `transient state` processes to acquire atomic-scale structural/chemical data with site specificity. The various electron sources and condenser optics enable high-resolution imaging, high-temporal resolution imaging, and chemical imaging, using fast-switching magnets to direct the different electron beams onto a single maneuverable objective pole piece where the sample resides. Such multimodal in situ characterization tools housed in a single microscope have the potential to revolutionize materials science.
17/ 035,267
September 28, 2020
1/1
H01J 37/28 (20060101)H01J 37/147 (20060101)H01J 37/12 (20060101)
;250/306,307,311
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.