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Magnetoelastically actuated MEMS device and methods for its manufacture

United States Patent

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10,510,945
December 17, 2019
View the Complete Patent at the US Patent & Trademark Office
A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.
15/ 719,219
September 28, 2017
1/1
H01L 41/12 (20060101)C25D 3/38 (20060101)C25D 3/56 (20060101)C25D 1/00 (20060101)H01H 59/00 (20060101)H01H 55/00 (20060101)H01L 41/20 (20060101)B81C 1/00 (20060101)B81B 3/00 (20060101)G02B 26/08 (20060101)H01G 5/16 (20060101)H01F 1/01 (20060101)H02N 1/00 (20060101)H03H 9/22 (20060101)H03H 3/06 (20060101)H01L 41/47 (20130101)
;324/209
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.