To address the current national emergency, U.S. entities may be eligible to license select Sandia intellectual property at no cost for a limited time. Learn more.

Search/Browse Tech

Magnetoelastically actuated MEMS device and methods for its manufacture

United States Patent

To discuss licensing opportunities, fill out our Contact Form 
December 17, 2019
View the Complete Patent at the US Patent & Trademark Office
A magnetoelastically actuated device includes a microscale cantilever arm supported at a standoff distance from a substrate. The cantilever arm is formed as a laminar magnetic actuator configured to bend when it is subjected to a magnetic field. The cantilever arm includes a film of magnetostrictive material. Also provided is a method for fabricating the magnetoelastically actuated device. The method includes defining an actuator mold in a layer of photoresist on a structural layer of the cantilever arm and electrodepositing a layer of a magnetostrictive alloy containing cobalt and iron onto the structural layer within the actuator mold.
September 28, 2017
H01L 41/12 (20060101); C25D 3/38 (20060101); C25D 3/56 (20060101); C25D 1/00 (20060101); H01H 59/00 (20060101); H01H 55/00 (20060101); H01L 41/20 (20060101); B81C 1/00 (20060101); B81B 3/00 (20060101); G02B 26/08 (20060101); H01G 5/16 (20060101); H01F 1/01 (20060101); H02N 1/00 (20060101); H03H 9/22 (20060101); H03H 3/06 (20060101); H01L 41/47 (20130101);
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.