METAL STACK TEMPLATES FOR SUPPRESSING SECONDARY GRAINS IN ScAlN
| Patent Number: | 11,482,660 |
| Issued: | 10/25/2022 |
| Official Filing: | View the Complete Patent |
| Application Number: | 661,393/16 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |