| Abstract: |   A mid-infrared tunable metamaterial comprises an array of resonators on a
     semiconductor substrate having a large dependence of dielectric function
     on carrier concentration and a semiconductor plasma resonance that lies
     below the operating range, such as indium antimonide. Voltage biasing of
     the substrate generates a resonance shift in the metamaterial response
     that is tunable over a broad operating range. The mid-infrared tunable
     metamaterials have the potential to become the building blocks of chip
     based active optical devices in mid-infrared ranges, which can be used
     for many applications, such as thermal imaging, remote sensing, and
     environmental monitoring. |