APPARATUS, METHOD AND SYSTEM FOR IMAGING AND UTILIZATION OF SEM CHARGED PARTICLES
| Patent Number: | 10,770,262 |
| Issued: | 9/8/2020 |
| Official Filing: | View the Complete Patent |
| Application Number: | 198,356/16 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |