Method of fabricating vertically aligned group III-V nanowires
| Patent Number: | 8,895,337 |
| Issued: | 11/25/2014 |
| Official Filing: | View the Complete Patent |
| Abstract: | A top-down method of fabricating vertically aligned Group III-V micro- and nanowires uses a two-step etch process that adds a selective anisotropic wet etch after an initial plasma etch to remove the dry etch damage while enabling micro/nanowires with straight and smooth faceted sidewalls and controllable diameters independent of pitch. The method enables the fabrication of nanowire lasers, LEDs, and solar cells. |
| Filed: | 1/17/2013 |
| Application Number: | 13/743,433 |
| Government Interests: | STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |