| Abstract: An accelerometer includes a proof mass and a frame that are formed in a
handle layer of a silicon-on-an-insulator (SOI). The proof mass is
separated from the frame by a back-side trench that defines a boundary of
the proof mass. The accelerometer also includes a reflector coupled to a
top surface of the proof mass. An optical detector is located above the
reflector at the device side. The accelerometer further includes at least
one suspension spring. The suspension spring has a handle anchor that
extends downwards from the device side to the handle layer to
mechanically support upward and downward movement of the proof mass
relative to a top surface of the proof mass. |
| Filed: 12/13/2011 |
| Application Number: 13/324012 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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