| Abstract: A method is disclosed which calculates dimensions for a MEM resonator in
terms of integer multiples of a grid width G for reticles used to
fabricate the resonator, including an actual sub-width L.sub.a=NG and an
effective electrode width W.sub.e=MG where N and M are integers which
minimize a frequency error f.sub.e=f.sub.d-f.sub.a between a desired
resonant frequency f.sub.d and an actual resonant frequency f.sub.a. The
method can also be used to calculate an overall width W.sub.o for the MEM
resonator, and an effective electrode length L.sub.e which provides a
desired motional impedance for the MEM resonator. The MEM resonator can
then be fabricated using these values for L.sub.a, W.sub.e, W.sub.o and
L.sub.e. The method can also be applied to a number j of MEM resonators
formed on a common substrate. |
| Filed: 9/17/2010 |
| Application Number: 12/884237 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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