Semipermeable Membranes for Micromachined Silicon Surfaces

Semipermeable silicon nitride membranes developed using an etch process for co-manufacture on a micromachined silicon surface

There is a need for a co-fabricated filtration system for enhancement of reliability and functionality in micro fluidic devices.Common polymer-based and metal based membranes are often incompatible with micromachining methods and requirements for packaging and chemical compatibility.The ability to utilize the benefits of a semi-permeable membrane without a secondary manufactured component increases functionality and integrability of micro fluidic devices and lab-on-chip applications.