| Abstract: A micromechanical resonator is disclosed. The resonator includes a
resonant micromechanical element. A film of annealable material can be
deposited on a facial surface of the element. The resonance of the
element can be tuned by annealing the deposited film. Also disclosed are
methods of applying a film on a resonator and annealing the film, thereby
tuning one or more resonant properties of the resonator. |
| Filed: 2/28/2013 |
| Application Number: 13/780285 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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