| Abstract: An integrated field emission array for ion desorption includes an
electrically conductive substrate; a dielectric layer lying over the
electrically conductive substrate comprising a plurality of laterally
separated cavities extending through the dielectric layer; a like
plurality of conically-shaped emitter tips on posts, each emitter
tip/post disposed concentrically within a laterally separated cavity and
electrically contacting the substrate; and a gate electrode structure
lying over the dielectric layer, including a like plurality of circular
gate apertures, each gate aperture disposed concentrically above an
emitter tip/post to provide a like plurality of annular gate electrodes
and wherein the lower edge of each annular gate electrode proximate the
like emitter tip/post is rounded. Also disclosed herein are methods for
fabricating an integrated field emission array. |
| Filed: 9/28/2011 |
| Application Number: 13/246985 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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