| Abstract: An electrostatic actuator is provide that can include a fluidic line, a
first electrode, and a second electrode such that a gate chamber portion
of the fluidic line is sandwiched between the first electrode and the
second electrode. The electrostatic actuator can also include a
pressure-balancing channel in fluid communication with the gate chamber
portion where the first electrode is sandwiched between the
pressure-balancing channel and the gate chamber portion. A pneumatic
valve system is provided which includes an electrostatic gate and a
fluidic channel fluidly separate from a fluidic control line. A pneumatic
valve portion of the fluidic control line can be positioned relative to a
portion of the fluidic channel such that expansion of the pneumatic valve
portion restricts fluid flow through the fluidic channel. Methods of
using an electrostatic actuator and a pneumatic valve system are also
provided. |
| Filed: 5/23/2013 |
| Application Number: 13/901200 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
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