| Abstract: An apparatus for use with extreme ultraviolet (EUV) light comprising A) a
duct having a first end opening, a second end opening and an intermediate
opening intermediate the first end opening the second end opening, B) an
optical component disposed to receive EUV light from the second end
opening or to send light through the second end opening, and C) a source
of low pressure gas at a first pressure to flow through the duct, the gas
having a high transmission of EUV light, fluidly coupled to the
intermediate opening. In addition to or rather than gas flow the
apparatus may have A) a low pressure gas with a heat control unit
thermally coupled to at least one of the duct and the optical component
and/or B) a voltage device to generate voltage between a first portion
and a second portion of the duet with a grounded insulative portion
therebetween. |
| Filed: 2/10/2014 |
| Application Number: 14/176587 |
| This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention. |
| Attribution for Derwent World Patents Index Records published on Sandia ® Clarivate. All rights reserved. Republication or redistribution of Clarivate content, including by framing or similar means, is prohibited without the prior written consent of Clarivate. Clarivate and its logo, as well as all other trademarks used herein are trademarks of their respective owners and used under license. |