|Ultra-thin hybrid and/or microporous materials and methods for their
fabrication are provided. In one embodiment, the exemplary hybrid
membranes can be formed including successive surface activation and
reaction steps on a porous support that is patterned or non-patterned.
The surface activation can be performed using remote plasma exposure to
locally activate the exterior surfaces of porous support.
Organic/inorganic hybrid precursors such as organometallic silane
precursors can be condensed on the locally activated exterior surfaces,
whereby ALD reactions can then take place between the condensed hybrid
precursors and a reactant. Various embodiments can also include an
intermittent replacement of ALD precursors during the membrane formation
so as to enhance the hybrid molecular network of the membranes.